Flow control device for a laser generator

摘要

A flow control device in a laser generator has a flow control valve disposed opposite a ring member to form an orifice. Laser gas flows from an inlet port into the flow control device, through the orifice, through the flow control valve and into the laser tube. The flow control valve is moveable axially toward and away from the ring member to vary the orifice to control the flow of laser gas in the laser tube. The laser tube also has a sub-hole for a sub-flow of laser gas in the laser tube. A throttling valve is disposed in the flow control device to throttle the flow of laser gas in the sub-hole.