| 摘要 |
PURPOSE:To perform laser beam machining with high accuracy by superposing other material having thickness of specified times the size of material to be machined on the worked bottom of ceramics, integrating these into one body and then, performing machining. CONSTITUTION:The direction of a laser beam 2 emitted from a laser main body 1 is changed by a bending mirror 3 and hole machining of the ceramics 10 is performed through a lens 4 of a nozzle 5. Other metallic material or ceramics having thickness of 0.02-0.25 times the size of the material to be machined (ceramics) 10 is then superposed as machining auxiliary material 13 on the worked bottom of the ceramics 10 and these are integrated into one body and then, machining is performed and a machined hole shape without a taper is formed. In addition, metallic material capable of plastic deformation is brought into contact with the worked bottom of the ceramics and the machining auxiliary material 13 is superposed on the bottom thereof. Consequently, the taper generated on the machined hole lower part can be obviated. |
