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发明名称
SEALING DEVICE FOR VACUUM TREATMENT INSTALLATION
摘要
申请公布号
JPS6240371(A)
申请公布日期
1987.02.21
申请号
JP19850179057
申请日期
1985.08.14
申请人
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
发明人
FURUYA SHOJI;NASU TOSHIYUKI
分类号
C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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