发明名称 THIN FILM TRANSISTOR AND MANUFACTURE THEREOF
摘要 PURPOSE:To largely reduce a pinhole defect of an insulating film caused by dust by forming an insulating film to be formed between a gate electrode and a semiconductor layer in 2 or more layers. CONSTITUTION:A gate electrode 2 is formed between lateral rows of display electrodes 8 and a drain electrode 6 is formed between the electrodes 8 in a partitioning manner, and a thin film transistor formed of a gate electrode 2, the first and second insulating films 3, 4, a semiconductor layer 5, a drain electrode 6, and a source electrode 7 at one corner of both crossing portions is so formed as to connect between the electrodes 8. The electrode 2 on a substrate 1 is 4,000Angstrom , the film 3 is 2,000Angstrom , the film 4 is 2,000Angstrom , the layer 5 is 1,000Angstrom , the electrodes 6, 7 are 1mum, and the electrodes 8 are approx. 1,000Angstrom in thickness.
申请公布号 JPS6240773(A) 申请公布日期 1987.02.21
申请号 JP19850180888 申请日期 1985.08.17
申请人 SANYO ELECTRIC CO LTD 发明人 OOIMA SUSUMU;SENOO YUTAKA;YUASA YOSHIHIRO
分类号 H01L29/78;G02F1/1333;H01L21/336;H01L27/12;H01L29/786 主分类号 H01L29/78
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