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发明名称
FORMING METHOD OF INSULATOR ISOLATING REGION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6240740(A)
申请公布日期
1987.02.21
申请号
JP19850179281
申请日期
1985.08.16
申请人
FUJITSU LTD
发明人
GOTO HIROSHI;TANAKA KAZUO
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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