EVACUATION PUMP SYSTEM FOR CONTINUOUS VACUUM DEPOSITION DEVICE,申请号JP19850179870-传众专利搜索

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发明名称	EVACUATION PUMP SYSTEM FOR CONTINUOUS VACUUM DEPOSITION DEVICE
摘要
申请公布号	JPS6240372(A)	申请公布日期	1987.02.21
申请号	JP19850179870	申请日期	1985.08.15
申请人	MITSUBISHI HEAVY IND LTD	发明人	YANAGI KENICHI;KATO MITSUO;WADA TETSUYOSHI;FURUKAWA HEIZABURO;SHIBAMURA AKIMITSU
分类号	C23C14/56	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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