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发明名称
MANUFACTURE OF EPITAXIAL WAFER
摘要
申请公布号
JPS6240719(A)
申请公布日期
1987.02.21
申请号
JP19850180662
申请日期
1985.08.16
申请人
NEC CORP
发明人
KANAMORI KATSU
分类号
H01L21/205;H01L21/22;H01L21/223
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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