SUBSTRATE TRANSFER MECHANISM FOR VACUUM DEVICE,申请号JP19850177558-传众专利搜索

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发明名称	SUBSTRATE TRANSFER MECHANISM FOR VACUUM DEVICE
摘要
申请公布号	JPS6240370(A)	申请公布日期	1987.02.21
申请号	JP19850177558	申请日期	1985.08.14
申请人	HITACHI LTD	发明人	ARIMATSU KEIJI;OIKAWA SHINZO
分类号	C23C14/56;C23F1/08;C23F4/00	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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