| 摘要 |
<p>PURPOSE:To contrive to enhance reliability, by forming a conductive layer to a heat insulating member and electrically connecting a substrate and a holding member. CONSTITUTION:A flow sensor is constituted so that wiring layers 14a, 15b are provided to a holding member 7 through insulating layers 14a, 14b and a membrane resistor 6 and the holding member 7 are fixed through heat insulating members 16a, 16b having low heat conductivity. Because the conductive layers are formed to the heat insulating members without using a bonding wire and the substrate and the holding member are electrically connected, the flow sensor becomes mechanically strong and the reliability of the flow sensor can be enhanced.</p> |
