| 摘要 |
PURPOSE:To improve the reliability by preventing water from flowing into a gas system optical resonator system even if a discharge tube is broken, by composing a power supply electrode out of a metallic block and cooling the inside compulsorily. CONSTITUTION:Each of the power supply electrodes 21 and 22 composed of a metallic block of aluminum etc. which is in close contact with a discharge tube 1 comprises a cooling water inlet 91 and a cooling water outlet 92 and is cooled by water compulsorily from inside. Because the metallic block is thus used, there is no relation between the breakage of the discharge tube 1 and the leakage of water and repair is easy. Also, as a water cooling jacket becomes needless, the device becomes of small size and it can be fabricated at low cost. |
