| 摘要 |
PURPOSE:To obtain a photosensitive body superior in electrostatic chargeability, sensitivity, and resistance to ambient conditions, low in residual potential, and good in adhesion by laminating on a conductive substrate plural a-Si or muC-Si electrostatic charge injection preventing layers, a photoconductive layer composed of an muC-Si layer and a-Si layers, and a surface layer, and incorporating specified elements in these layers. CONSTITUTION:A gas mixture of SiH4, B2H6, CH4, He, H2, etc., in a specified composition is decomposed by the glow discharge method and the electrostatic charge injection preventing layers 22, 23 made of a-Si or muC-Si, the photoconductive layer 31 composed of the a-Si layers 24, the muC-Si layer 25, and the a-Si layers 26, and the a-Si surface layer 27 are formed on the conductive substrate 21. The layer 25 has a crystal diameter of 2-10nm, and a crystallinity of 1-90%. The layer 25 has a layer thickness of 0.5-70mum, and each of the layers 24, 26 has a layer thickness of <=0.5mum. At least one of elements of groups III and V and C, N, and O is incorporated in the layer 31, 22, 23, and at least one of C, N, and O is incorporated in the layer 27. |
