发明名称 BONDING APPARATUS
摘要 PURPOSE:To provide-the title apparatus which enhances the reliability of a product (a semiconductor device) and which reduces the burden of an operator at the same time by a method wherein the mounting operation of a semiconduc tor element on a board by a manual operation and, in addition, a wire bonding operation are mechanized. CONSTITUTION:The title apparatus is featured by providing a board conveyance part 11 provided with the following: a rail 23 arranged at the lower part of a bonding head 16; and a carrier 15 in which locating holes 17 are made at a peripheral edge part in the lengthwise direction so as to travel freely along the rail 23, which sandwiches side faces of each board 2 at the inside while the side faces are being positioned by using one pair of claw parts via spring members, which holds said board and which is composed of one plate.
申请公布号 JPH04326740(A) 申请公布日期 1992.11.16
申请号 JP19910097378 申请日期 1991.04.26
申请人 TOSHIBA CORP 发明人 KACHI KAZUO
分类号 H01L21/58;H01L21/50;H01L21/52;H01L21/60 主分类号 H01L21/58
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