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经营范围
发明名称
PROBE TESTING PROCESS
摘要
申请公布号
JPS6239021(A)
申请公布日期
1987.02.20
申请号
JP19850178721
申请日期
1985.08.14
申请人
TOSHIBA CORP;TOSHIBA MICRO COMPUT ENG CORP
发明人
MIYAZAKI TSUTOMU;ETO HISAHIKO;TOZAWA SHIN
分类号
H01L21/66;G01R1/073;G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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