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发明名称
KEMISKT PAOFYLLNINGSSYSTEM.
摘要
申请公布号
FI870727(A)
申请公布日期
1987.02.20
申请号
FI19870000727
申请日期
1987.02.20
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
LIPISKO, BRUCE A.;SCHUMACHER, JOHN C.;HOWARD, RICHARD E.;RANDTKE, PETER T.;SANDU, ADRIAN;FLECHER, ROBERT E.;GRAF, HANS-JUERGEN
分类号
H01L21/205;B01J3/02;B01J4/00;B01J19/00;C30B31/16;H01L21/22;H01L21/223;(IPC1-7):B01J/
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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