APPARATUS FOR INSPECTING FRONT AND BACK SURFACES OF WAFER,申请号JP19850180230-传众专利搜索

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发明名称	APPARATUS FOR INSPECTING FRONT AND BACK SURFACES OF WAFER
摘要
申请公布号	JPS6239705(A)	申请公布日期	1987.02.20
申请号	JP19850180230	申请日期	1985.08.16
申请人	TOSHIBA CORP	发明人	OKABE TAKASHI
分类号	G01B11/30	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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