| 摘要 |
PURPOSE:To obtain a gas mixing apparatus capable of diffusing and mixing gas with good efficiency, by connecting a plurality of gas mixing chambers in series through flow passage opening/closing devices and further connecting the same in parallel so as to form at least two systems and successively performing the opening and closing of the outflow port of each system at every system. CONSTITUTION:A flow passage system is constituted by connecting gas mixing chambers 111-11n and flow passage opening/closing devices 121-12n such as shutters in series and (m) systems each comprising thus formed flow passage system are prepared corresponding to the kinds of plural gases to be mixed. In this constitution, the flow passage opening/closing devices are successively opened and closed at every time determined corresponding to the kinds of gases. That is, when the flow passage opening/closing device 121 is closed, plural gases to be mixed are flowed in the mixing chamber 111 to be dispersed and mixed. This diffused and mixed gas advances to the mixing chamber 112 from the mixing chamber 111 when the opening/closing device 122 is closed and the opening/closing device 121 is opened. By this method, plural gases to be mixed are allowed to advance toward the outflow port 12n while diffused and mixed in plural stages. The gases to be mixed are successively supplied and sent toward the outflow port 3 of the whole while phases are made different in the systems. |
