ION BEAM MEASURING DEVICE,申请号JP19850175883-传众专利搜索

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发明名称	ION BEAM MEASURING DEVICE
摘要
申请公布号	JPS6237854(A)	申请公布日期	1987.02.18
申请号	JP19850175883	申请日期	1985.08.12
申请人	HITACHI LTD	发明人	FUKUDA SHINJI;MIURA YOSHIO
分类号	H01J37/04;H01J37/304;H01J37/317	主分类号	H01J37/04
代理机构		代理人
主权项
地址

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