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发明名称
VERFAHREN ZUM SCHLEUSEN SCHEIBENFOERMIGER OBJEKTE IN EINE VAKUUMKAMMER
摘要
申请公布号
DD243138(A1)
申请公布日期
1987.02.18
申请号
DD19850283427
申请日期
1985.11.29
申请人
VEB CARL ZEISS JENA,,,,DD
发明人
NEULAND,RUDI,DD;PLISCHKE,WALTER,DD
分类号
H01J37/18;(IPC1-7):H01J37/18
主分类号
H01J37/18
代理机构
代理人
主权项
地址
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