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发明名称
SUBSTRATE HEATING METHOD
摘要
申请公布号
JPS6237923(A)
申请公布日期
1987.02.18
申请号
JP19850177894
申请日期
1985.08.12
申请人
NISSIN ELECTRIC CO LTD
发明人
KATO YOSHINAO;INABA TETSUJI
分类号
H01L21/203;H01L21/26
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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