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经营范围
发明名称
PATTERN FORMATION
摘要
申请公布号
JPS6236824(A)
申请公布日期
1987.02.17
申请号
JP19850176450
申请日期
1985.08.10
申请人
FUJITSU LTD
发明人
MIYAGI SHINJI;YASUDA HIROSHI
分类号
H01L21/027;H01L21/30
主分类号
H01L21/027
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代理人
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