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发明名称
摘要
申请公布号	JPS627335(B2)	申请公布日期	1987.02.17
申请号	JP19820218397	申请日期	1982.12.15
申请人	EBARA MFG	发明人	KATAOKA ISAO;GOTO TETSUO;YAMANAKA KOICHI;AOKI MASANORI;NISHIWAKI TOSHIAKI
分类号	E03F5/14;B01D21/26;B01D21/30	主分类号	E03F5/14
代理机构		代理人
主权项
地址

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