摘要 |
PURPOSE:To prevent the decline in the laser output by preventing a coolant cooling the laser oscillator from mixing with air bubbles thereby devising the cooling method absorbing the thermal expansion of a cooling medium as well as having the excellent cooling effect. CONSTITUTION:A coolant guide 23 in a bellows shape is provided inside a coolant tank 3 having a bellows 22 type outer barrel while a cooling fan 15 is arranged on the side of the bellows 22. On the other hand, the coolant tank 8 is coupled with a cavity 5 self-containing a flash lamp 1, a YAG rod 3 and a condenser barrel 4 as well as a pump 17 using the first, second and third pipings. |