| 摘要 |
PURPOSE:To obtain a low-cost mask small in dimensional strain and superior in strippability by attaching Al or an aluminum alloy on an insulating substrate, forming a desired pattern, and an alumina film pattern by chemical treatment. CONSTITUTION:A circuit pattern of a thin Al film 3 is formed on a quartz plate 1, and on this surface an alumina film 4 is formed only by immersing the Al film 3 into pure boiled water at 100 deg.C for 1min. Al is stronger in adhesion to the quartz plate 1 than Cr, and not peeled by friction or the like. The hardness of the alumina film 4 is higher than the quartz film and has strength high enough to endure friction. |
