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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6235533(A)
申请公布日期
1987.02.16
申请号
JP19850174806
申请日期
1985.08.08
申请人
SEIKO EPSON CORP
发明人
FURUHATA TOMOYUKI
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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