| 摘要 |
PURPOSE:To provide a quartz glass crucible capable of producing a high-quality silicon single crystal, by specifying the contents of Na, K, Li and Cu, and the viscosity and electrical resistance of the glass. CONSTITUTION:A quartz glass crucible containing <=0.2ppm each of alkali metals comprising Na, K and Li, and <=0.02ppm of Cu, and having a viscosity of >=10<10> poise at 1,450 deg.C and an electrical resistance of >=1.4X10<7>OMEGA.m at 1,200 deg.C. By restricting the contents of the alkali metal and copper within the above ranges, the contents of the alkali metals and copper in the Si single crystal are decreased and the viscosity of quartz glass is increased, and accordingly, the obtained crucible is resistant to deformation and corrosion at high temperature. By restricting the electrical resistance within the above range, the dissolution of crucible in the molten Si is suppressed, the convection of molten Si is retarded, and the corrosion of the inner surface of the crucible is decreased in the process for growing the single crystal under a magnetic field. |
