发明名称 MANUFACTURE OF SEMICONDUCTOR PLACING DEVICE
摘要 <p>PURPOSE:To reduce a mounting area and increase its density by forming a thick film resistor on a ceramic substrate of simultaneous baking type. CONSTITUTION:A conductor paste is printed on alumina green sheet of unbaked ceramic material, laminated, pressed to be formed in multilayers, and baked to obtain a multilayer alumina ceramic material 1 formed with the first conduc tor wiring pattern 20. Then, after an electroless nickel plating 21 and an electroless gold-plating 22 are formed on the pattern 20, silver-palladium thick film conductor paste is printed, and baked to obtain a silver-palladium thick film conductor 30. Then, ruthenium oxide thick film resistance paste is printed and baked at the position not contacted with the conductor 30 on the material 1 to obtain a thick film resistor 3. Subsequently, a paste which mainly contains palladium metal particles and glass powder is so printed and baked as to be superposed on the end of the resistor 3 and the periphery of the conductor 30 to obtain an activated layer 50 for electroless plating.</p>
申请公布号 JPS6235553(A) 申请公布日期 1987.02.16
申请号 JP19850174463 申请日期 1985.08.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 TAKADA MITSUYUKI;TAKASAGO HAYATO;YOSHIOKA TAKESHI;ONISHI YOICHIRO
分类号 H01L27/01;H05K3/46 主分类号 H01L27/01
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