| 摘要 |
PURPOSE:To protect accuracy in detecting a target pattern for the remedy of defective bits from reduction by a method wherein the target pattern is exposed and a positioning laser beam is projected directly upon the exposed target pattern. CONSTITUTION:A laser beam applied to the region of a target pattern 10 attacks a passivation film 13 coating the target pattern 10 and burns it down. The target pattern 10 is exposed after the removal of the passivation film 13, which allows the laser beam to reach the target pattern 10. The laser beam is reflected by the target pattern 10, goes through a beam positioner 5, and enters a receptor 7 via a reflecting mirror 6. A portion of the laser beam reaching the edge of the target pattern 10 experiences random reflection, which reduces the luminous energy entering the receptor 7. The luminous energy reduced by random reflection is compared with the luminous energy of the other portion of the laser beam, which allows accurate optical detection to be accomplished of the target pattern 10. |
