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发明名称
REDUCTION PROJECTION TYPE EXPOSURE
摘要
申请公布号
JPS6235621(A)
申请公布日期
1987.02.16
申请号
JP19850175383
申请日期
1985.08.09
申请人
NEC KYUSHU LTD
发明人
SARUWATARI SHINSUI
分类号
H01L21/30;G03F7/20;G03F9/00;H01L21/027;H01L21/67;H01L21/68
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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