| 摘要 |
PURPOSE:To set the relative position and the angle of the light guide and the mirror with a high accuracy and a high stability by forming directly the mirror to input and output of the light of the light guide at the prescribed position of the substrate. CONSTITUTION:A mirror 4 to input and output the light of a light guide 1 is directly formed at the prescribed position of a substrate 2. Namely, the mirror 4 is one surface shown by a straight line A-A' of the substrate 2, and for such a reason, it is obvious that the position and the angle of mirror 4 are stable to the substrate 2. The light guide 1, for example, is deposited and formed on the substrate 2 where the mirror 4 is formed on a body, by the method such as a CVD, an LPE, etc. Thus, the position and the angle of the light guide 1 as well as the mirror 4 are stable with respect to the substrate 2, the photoli thography technology can be applied to the setting of the position on the sub strate 2 of the light guide 1 and the mirror 4, and therefore, the setting can be executed with a good accuracy. |
