发明名称 BONDING DEVICE
摘要 PURPOSE:To prevent a material from oxidation by a method wherein a reducing gas supply source is connected to a gas passageway provided in the interior of each lead frame press, and gas blow-off holes are also provided to the gas passageway. CONSTITUTION:A gas passageway 11 is provided by bring in the interior of each lead frame press 8 as to be provided nearly along the configuration of the lead frame press and plural pieces of blow-off holes 12 are respectively provided openly on chamfering parts 8a provided by cutting at the edge parts on the both sides of the lower surface of the lead frame press 8 as to be connected to the gas passageway 11. A pipe 13, whose one end is connected to the reducing gas supply source, is laid on the upper surfaces of the lead frame presses 8 including a supporting part 9 as to tightly adhere and the interior of the pipe 13 is connected to the gas passageways 11 through connecting paths 14. Then, reducing gas is blown off from the lead frame passes, there by enabling to effectively prevent the lead frame from oxidation.
申请公布号 JPS6235632(A) 申请公布日期 1987.02.16
申请号 JP19850174127 申请日期 1985.08.09
申请人 HITACHI LTD 发明人 CHUMA TOSHIO;HORII MASAHIRO
分类号 H01L21/52;H01L21/58 主分类号 H01L21/52
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