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发明名称
摘要
申请公布号
JPS627268(B2)
申请公布日期
1987.02.16
申请号
JP19790063131
申请日期
1979.05.21
申请人
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
发明人
TOYODA HIROYASU;ITAKURA HIDEAKI;KOMYA HIROYOSHI;TOBINAGA MINETO
分类号
C23F4/00;C23F1/00;H01L21/302
主分类号
C23F4/00
代理机构
代理人
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