| 摘要 |
PURPOSE:To enable a driver position to be finely adjusted, by winding a belt- shaped heater in the periphery of a heat resisting and low heat conductive ceramic bearing while arranging a heat resisting ceramic guard in the periphery of the belt-shaped heater so as to thermally insulate the heater from an external plate. CONSTITUTION:A mechanism, supporting an adjusting driver 1 by a heat resisting ceramic bearing 2 of low heat conductivity, enables its position on the plane to be adjusted in a fine adjustment range 7 in a condition that low temperature solder 3 is melted. In order to prevent a belt-shaped heater 4 from transmitting its heat to a plate 6, the periphery of the belt-shaped heater 4 is coated with a ceramic guard 5 transmitting almost no heat. And the ceramic bearing 2 is fixed in the normal temperature, but when fine adjustment is performed, the mechanism, melting the low temperature solder 3 heated to the melting point by the belt-shaped heater 4 and giving a freedom degree to the ceramic bearing 2, enables a position on the plane of the multi spindle driver to be finely adjusted in a specified range. |
