PHASE SHIFT MASK AND THE MANUFACTURING METHOD THEREOF HAVING CHROME FILM

摘要

a transparent substrate where light propagates; multiple phase inversion material pattern which have a predetermined shape and is fabricated on the transparent substrate; a chrome film fabricated on the phase inversion material pattern above the predetermined size. And the method includes the step of: fabricating a phase inversion pattern on a quartz substrate; fabricating the first sensitive film pattern; fabricating the first chrome pattern by eliminating the first sensitive film pattern; fabricating the sensitive film pattern; baking the second sensitive film pattern; fabricating the third sensitive film pattern; fabricating spacer oxide film on the wall of the second sensitive film pattern; fabricating the second chrome film.