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发明名称
DEFECT INSPECTING DEVICE
摘要
申请公布号
JPH0854352(A)
申请公布日期
1996.02.27
申请号
JP19940207954
申请日期
1994.08.09
申请人
MITSUBISHI RAYON CO LTD
发明人
SAITO NORIAKI;FUSE MASAKI
分类号
G01N21/88;G01N21/89;G01N21/892;G01N21/894;G01N21/898;G01N21/93;G01N21/94;G06T1/00;G06T5/00;G06T7/00;(IPC1-7):G01N21/89
主分类号
G01N21/88
代理机构
代理人
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地址
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