| 摘要 |
PURPOSE:To make it possible to desirbly correct the thickness of a formed film, by combining a revolution correcting plate with a planetary type film forming apparatus equipped with a rotation and revolution type base plate holder. CONSTITUTION:A base plate holder 7 is rotated (revolved) by the rotation (revolution) of a revolution ring like member 2 and the inner side surface of the holder 7 is constituted so as to be confronted with an evaporation source 1. In this case, a revolution film thickness correcting plate 10 is provided to an attaching arm 9 detachable to said member 2 and each plates 10 are positioned in opposed relation to the inner side surfaces of the combined holders 7 to be revolved along with the revolution of the holders 7. The shapes of the plates 10 operate a film forming apparatus without using a correcting plate and the thickness distribution data of a formed film is repeatedly measured under a same condition to determine average film thickness distribution as shown by figure. To is the min. film thickness value of an average distribution curve while Ti is a film thickness value at a radius direction distance Xi from the rotation shaft of the holder 7 and, if Ti thicker than To is cut along said direction, a uniform thickness of a formed film is obtained. |
