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经营范围
发明名称
Method for forming insulating film.
摘要
申请公布号
EP0653783(A3)
申请公布日期
1996.04.24
申请号
EP19940117440
申请日期
1994.11.04
申请人
CANON SALES CO., INC.;ALCAN-TECH CO., INC.;SEMICONDUCTOR PROCESS LABORATORY CO., LTD.
发明人
MAEDA, KAZUO;YUYAMA, YOSHIAKI;TOKUMASU, NOBORU
分类号
H01L21/205;C03C3/089;C23C16/40;H01L21/31;H01L21/316;(IPC1-7):H01L21/316;C03B8/04
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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