发明名称 FLACHLAEPPMASCHINE
摘要 Described herein is a flat lapping machine capable of precision-abrading simultaneously flat surfaces on the front and rear sides of a work in the fashion of lapping, polishing and grinding machines. The present invention contemplates to provide a flat lapping machine which is simplified in construction as compared with conventional flap lapping machines having a large number of carriers in planetary motions, and which can stop the respective carriers easily in specific positions and directions at the end of a lapping operation. To this end, the present invention employs a large number of support gear mechanisms each constituted by a plural number of small gears and located at uniform intervals around a center gear, rotatably supporting the respective carriers in predetermined positions while the respective carriers are driven by the center gear.
申请公布号 DE3624878(A1) 申请公布日期 1987.02.12
申请号 DE19863624878 申请日期 1986.07.23
申请人 SPEEDFAM CO.,LTD. 发明人 ARAI,HATSUYUKI;NAGAHASHI,ISAO;MAEDA,SEIICHI;YASUDA,KAZUMI;FURUSAWA,SHIROU;NAGAO,KATSUNORI;HIRATA,KAZUHIKO;KONDOU,KAZUHIKO;SANOKI,TAKAYA;SUGIYAMA,MISUO;KUSANO,SHINICHI
分类号 B24B37/04;B24B37/08;B24B37/28;(IPC1-7):B24B37/04 主分类号 B24B37/04
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