| 摘要 |
PURPOSE:To prevent arc movement even at large aglow-discharge injecting power, by constituting an upstream side electrode with a spiral conducting material, which has approximately circular annular cross section, and sending laser gas to a discharge tube from the outer surface part of the electrode. CONSTITUTION:As an electrode 5, a spiral conductor 10, which is formed in an annular shape, is used. Therefore, the density at the peripheral part of the annular shape is coarse and the density in the vicinity of the center is dense in this conductor arrangement. Laser gas 11, which flows in from the outer surface, hits outer conductors 12 and inner conductors 13. Vortexes 14 and 15 are yielded behind the conductors. The gas flows to a central part 16. At this time, the flow speed of the laser gas becomes the maximum value in the vicinity of the inner conductors 13. A glow 18, which is generated in the vicinity of the maximum electric field point, is stirred with the yielded vortexes 14 and 15 and a high speed gas stream 17. The gas is uniformly expanded in the laser tube. Thus the arc is not moved even at large glow-discharge injecting power. |
