| 摘要 |
PURPOSE: To prevent dust from adhering to substrates when a roller and a substrate make contact in a substrate carrier for supporting an end surface and a rear surface of the substrate to be carried. CONSTITUTION: In a carry roller 8 for supporting an end surface and a rear surface of a substrate 1, a escape groove 15 is provided in a substrate rear surface contact part 14 of a roller 3 fixed to a shaft 2 and an air nozzle 4 is arranged above each of the rollers 3 and a discharge unit 6 is arranged under the roller 3, respectively. For this reason, air 5 is sprayed to eradicate dust 12 into the escape groove 15 to prevent the dust 12 from adhering to the substrate 1 when the roller 3 and the substrate 1 make contact, so that it becomes possible to discharge by a discharge unit 6. |
