发明名称 |
HIGHLY STABILIZED BEAM GENERATOR FOR CHARGED PARTICLES |
摘要 |
An electron beam generating system provides a high degree of steadiness of the beam current and comprises a heated cathode, an auxiliary electrode lying at a more negative potential than the cathode, and a transpierced anode. A diaphragm surrounding the beam and connected to a precision resistor is further provided at that side of the auxiliary electrode facing away from the cathode. A portion of the beam current influenced by the control electrode is blanked out by the diaphragm. The precision resistor is connected as an actual value generator to a regulator which is connected to a reference voltage, the output of the regulator influencing the potential of the control electrode over a final control element for the purpose of maintaining the beam current measured by the diaphragm constant. |
申请公布号 |
DE3175821(D1) |
申请公布日期 |
1987.02.12 |
申请号 |
DE19813175821 |
申请日期 |
1981.10.21 |
申请人 |
DR.-ING. RUDOLF HELL GMBH |
发明人 |
BEISSWENGER, SIEGFRIED;BOPPEL, WOLFGANG |
分类号 |
H01J37/04;H01J37/06;H01J37/24;H01J37/248;(IPC1-7):H01J37/24 |
主分类号 |
H01J37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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