| 摘要 |
PURPOSE:To machine the floating surface of a slider which faces disk media and the surface of a protection film which protects a thin-film sensor into nearly the same plane and to eliminate deterioration in characteristics by forming the floating surface of a material of the same quality with the protection film. CONSTITUTION:The thin-film magnetic sensor 15 and protection film 19 are formed on the top surface of a ferrite or alumina substrate by a thin-film process, the substrate is cut into a lateral rod which includes plural magnetic sensors 14, and a part which becomes the floating surface is ground by 5-10mum through ion milling, etc. A film (a) of the same material with the protection film is formed at the part by sputtering, etc. Then, grinding and polishing are carried out up to specific size, and the body is cut into a perfect slider body. When the polishing working is performed, the grinding and polishing advance at nearly the same speed and the nearly complete plane is obtained. |
