发明名称 Vertically layered MOMOM tunnel device
摘要 MOMOM structural geometry and fabrication techniques are disclosed. First and second metal layer strips (6 and 10) are supported on an insulating substrate (4) and have vertically overlapped portions sandwiched between insulating layers (8, 12). A generally vertical side (18) is defined through the layers to the substrate to expose vertical edges (20, 24) of the metal layers which are oxidized (32, 34) and covered by a third metal layer (44) extending therebetween. In the preferred embodiment, the middle insulating layer (8) is undercut (28), oxidized (36, 40), and filled with metallization (50), to provide a vertical rectilinear conduction path.
申请公布号 US4642665(A) 申请公布日期 1987.02.10
申请号 US19840683729 申请日期 1984.12.19
申请人 EATON CORPORATION 发明人 LADE, ROBERT W.;BENJAMIN, JAMES A.;SCHUTTEN, HERMAN P.
分类号 H01L49/02;H01L21/33;H01L29/70;H01L31/10;H01L45/00;(IPC1-7):H01L49/02;H01L27/14 主分类号 H01L49/02
代理机构 代理人
主权项
地址