| 摘要 |
PURPOSE:To improve the mechanical and the optical properties and the stability of the titled body by laminating the prescribed layers composed of such as a specific amorphous hydrogenated silicon etc. respectively. CONSTITUTION:An electric charge blocking layer 44 composed of an amorphous hydrogenated silicon (a-Si:H) contg. at least one kind atom selected from a carbon, a nitrogen, and an oxygen atoms, and heavily dopped with the group III element of the periodic table, an electric charge transfer layer 42 composed of a-Si:H contg. the carbon and the hydrogen atoms and a blocking layer 43 composed of a-Si:H are laminated on a substrate 41. And the first intermediate layer 47 composed of a-Si:H and dopped with the group IIIa or Va element of the periodic table, the second intermediate layer 46 composed of a-Si:H contg. one kind atom selected from the carbon and the hydrogen atoms nd the surface reforming layer 45 composed of a-Si:H contg. large amounts of the atom are laminated on the layer 44 to form the photosensitive body 39. By providing the layers 45-47, the mechanical strength of the titled body becomes large. The adhesive property, the anti-fatigue property against a light and the anti- chemical stability of the layers 45 and 43 are improved. The effects as prescribed above are obtd. by merely using a fluorinated silicon or by jointly using the fluorinated silicon and the prescribed silicon. |
