| 摘要 |
PURPOSE:To improve the mechanical and the optical properties and the stability of the titled body by laminating the prescribed layers composed of such as a specific amorphous hydrogenated silicon (a-Si:H) etc. respectively. CONSTITUTION:An electric charge blocking layer 44 composed of a-Si:H contg. >=1 kind atoms selected from a carbon, nitrogen, and an oxygen atoms, and an electric charge transfer layer 42 composed of a-Si:H contg. the nitrogen atom and an electric charge generating layer 43 composed of a-Si:H are laminated on a substrate 41. And the first intermediate layer 47 composed of a-Si:H and dopped with the group IIIa or Va element of the periodic table, the second intermediate layer 46 composed of a-Si:H contg. at least one kind atom selected from the carbon, the nitrogen and the oxygen atoms and the surface reforming layer 45 composed of a-Si:H contg. large amounts of the atom are laminated on the substrate 41 to form the photosensitive body 39. By providing the layers 45-47, the mechanical strength of the titled body becomes large. The adhesive property, the anti-fatigue property against a light and the anti-chemical stability of the layers 45 and 43 are improved. The effects as prescribed above are obtd. by merely using a fluorinated silicon or by jointly using the fluorinated silicon and the prescribed silicon. |
