发明名称 |
Spectrometer with non-spherical mirror, esp. for short-wave radiation |
摘要 |
The spectrometer includes a light source (3), a spectroscopic element planar grating (5) and reflecting mirrors. One reflecting mirror is a non-spherical mirror (6), which is brought into its non-spherical form through applying an external force on a disk. The non-spherical mirror may be a cylindrical parabolic or elliptic mirror. The light source provides an emission of electro-magnetic radiation from an ultraviolet range up to an X-ray range.
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申请公布号 |
DE19731964(A1) |
申请公布日期 |
1998.01.29 |
申请号 |
DE19971031964 |
申请日期 |
1997.07.24 |
申请人 |
NIKON CORP., TOKIO/TOKYO, JP |
发明人 |
MASHIMA, KIYOTA, MARUNOUCHI, JP;ISHIGURO, EIJI, MARUNOUCHI, JP |
分类号 |
G01J3/10;G01J3/18;G02B5/10;G02B5/18;(IPC1-7):G01J3/10;G02B7/185;G02B26/00 |
主分类号 |
G01J3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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