发明名称 Spectrometer with non-spherical mirror, esp. for short-wave radiation
摘要 The spectrometer includes a light source (3), a spectroscopic element planar grating (5) and reflecting mirrors. One reflecting mirror is a non-spherical mirror (6), which is brought into its non-spherical form through applying an external force on a disk. The non-spherical mirror may be a cylindrical parabolic or elliptic mirror. The light source provides an emission of electro-magnetic radiation from an ultraviolet range up to an X-ray range.
申请公布号 DE19731964(A1) 申请公布日期 1998.01.29
申请号 DE19971031964 申请日期 1997.07.24
申请人 NIKON CORP., TOKIO/TOKYO, JP 发明人 MASHIMA, KIYOTA, MARUNOUCHI, JP;ISHIGURO, EIJI, MARUNOUCHI, JP
分类号 G01J3/10;G01J3/18;G02B5/10;G02B5/18;(IPC1-7):G01J3/10;G02B7/185;G02B26/00 主分类号 G01J3/10
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