| 摘要 |
PURPOSE:To provide precision feed of an X-Y table, which is to locate a work or tool, by furnishing the first linear motor between a stationary bed and an intermediate saddle and the second linear motor between the intermediate saddle and table, and by providing these two motors with a pitch difference. CONSTITUTION:The first liner motor 20 installed between a stationary bed 1 and intermediate saddle 2 arranges the first and the second moving elements 22a, 22b at the undersurface of the intermediate saddle 2 and a stator 23 at the oversurface of the stationary bed 1. The second linear motor 20' between the intermediate saddle 2 and table body 3 arranges the first and the second moving elements 22a', 22b' at the undersurface of table body 3 and a stator 23' at the oversurface of intermediate saddle 2 at a different pitch from that of the first linear motor 20. If isopolar pulses are fed in the two motors, the table body 3 will be in fast transported condition, and if the pulses are given opposite polarities, it will be in micro-movement condition. Thus precision feeding will become practicable. |
