| 摘要 |
<p>PROBLEM TO BE SOLVED: To detect cooling liquid permeating into an equipment, and facilitate elimination of the cooling liquid by installing a liquid detection absorption means which detects and absorbs cooling liquid, permeating from the working region of a dicing equipment into the inside of the equipment. SOLUTION: A wafer W is arranged on a wafer chuck 10, which cam move on the upper plate 31 of a cabinet of an electric apparatus part 30. A water detection absorption means 21 is installed below a bellows cover 16 on the upper plate 31 of the cabinet of the electric apparatus part 30. The water detection absorption means 21 consists of the following: a water absorption body composed of a high-molecular absorption polymer, a bare wire which is fixed to the water absorption body and constituted of conductor such as a copper wire, a covered wire formed by covering conductor such as a copper wire with insulator, a connector part connecting the covered wire with a detection circuit part, and the detection circuit part having an indicator constituted of a DC power source and a photodiode and a resistor. The detection circuit part is installed in the electric apparatus part 30 and connected with it through the covered wire.</p> |
