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发明名称
CHECKING APPARATUS
摘要
申请公布号
JPH10340935(A)
申请公布日期
1998.12.22
申请号
JP19970149231
申请日期
1997.06.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
MUGIBAYASHI TOSHIMITSU;KATAYAMA SANENORI;MIYAZAKI YOKO
分类号
G01B11/00;G01N21/88;G01N21/93;G01N21/956;G06T1/00;G06T7/00;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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