| 发明名称 |
Slip free vertical rack design |
| 摘要 |
Vertical rack for supporting semiconductor wafers, the rack having either continuously upward angled arms or horizontal arms for providing near center support of the wafers.
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| 申请公布号 |
US5865321(A) |
申请公布日期 |
1999.02.02 |
| 申请号 |
US19970903267 |
申请日期 |
1997.07.25 |
| 申请人 |
SAINT-GOBAIN/NORTON INDUSTRIAL CERAMICS CORP. |
发明人 |
TOMANOVICH, JOHN A. |
| 分类号 |
C23C16/458;H01L21/205;H01L21/22;H01L21/324;H01L21/673;H01L21/683;(IPC1-7):A47F29/00 |
主分类号 |
C23C16/458 |
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