| 摘要 |
<p>PURPOSE:To obtain a semiconductor device manufacturing apparatus operating according to many operation parameters which does not erroneously operate by sorting and grouping working units to a hierarchy from upper concepts to lower concepts, storing them, and reading out and displaying them by unit designating means. CONSTITUTION:The working units of a semiconductor manufacturing apparatus are hierarchized to works of type units, step units and shooting units of semiconductor products, and the main work of high setting and altering frequencies of many operating parameters is hierarchized in relation to the units. For example, they are divided to upper, intermediate and lower concepts such as an operation parameter decided by the type unit, an operation parameter decided by the step unit and an operation parameter as to shooting, hierarchized and sorted. Here, the parameter of the upper concept contains step size, row and column numbers, the intermediate concept contains mode, reticle number and alignment mark position, and the lower concept contains exposure time and printing time.</p> |
